HORIBA France SAS LabRAM Odyssey Semiconductor en Kioto, Japón
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Especificaciones
- Condición
- nuevo
- Dimensions
- W × H × D (mm): 1400 × 620 × 1410
- Optical microscope
- Open space microscope with white light reflection illumination, camera, 5×, 10×, 100× objectives as standard. Optional motorized objective turret.
- Spectral range
- Standard 200 nm - 2200 nm from sample to detector (achromatic, no change of optics required).
- Imaging spectrometer
- Focal length: 800 mm. Spectral resolution FWHM at 532 nm excitation wavelength ≤ 0.6 cm -1 with 1800 gr/mm and ≤ 0.3 cm -1 with 3000 gr/mm. Spectral stability RMS: < 0.02 cm -1 RMS Measured on Si 520 cm -1 line. Equipped with Open Electrode CCD (standard), optional EMCCD, optional InGaAs arrays detector (max. 3 detectors).
- Spatial resolution
- XY lateral resolution < 0.5 µm; Z axial resolution < 1.5 µm.
- 300 mm × 300 mm motorized stage
- XY high precision encoded motorized stage (X = 300 mm, Y = 300mm) with repeatability ≤1 µm; accuracy = 1 µm; resolution (encoder) = 50 nm; minimum motor step size = 10 nm. Z specifications: resolution (minimum step size) = 0.01 µm. Holders for 4" (100 mm), 6" (150 mm), 8" (200 mm) and 12" (300 mm) size wafers available. Vacuum compatible wafer holders.
- Lasers
- User selectable: 266 nm, 325 nm, 355 nm, 405 nm, 458 nm, 473 nm, 532 nm, 633 nm, 660 nm, 785 nm, & 1064 nm. Up to 6 motorized.
- Duoscan™
- DuoScan™ technology for fast Laser scanning and Macrospot imaging (typical macrospot dimensions 30 µm × 30 µm with 50× objective).
- Categoría
- Espectroscopia en Japón
- Subcategoría
- Scientific
- Subcategoría 2
- Raman spectroscopy
- ID de Anuncio
- 95778077
Descripción
Photoluminescence and Raman Wafer Imaging
The LabRAM Odyssey Semiconductor microscope is the ideal tool for photoluminescence and Raman imaging on wafers up to 300 mm diameter. The HORIBA best-seller true confocal microscope is equipped with automated 300 mm sample stage and objective turret to fit both needs of wafer uniformity assessment and defects inspection.
Presentation video
LabRAM Odyssey Semiconductor includes hardware and software designed for semiconductors analysis:
Wafer mapping with automated turret and sample stage
The automated 300 mm × 300 mm XY
sample stage
accepts
wafers up to 300 mm (12") diameter
for Raman and Photoluminescence mapping of both full wafers and small regions of interest (ROI). The travel speed of the stage together with its stability ensure fast and reliable measurements over ROIs spread over the wafer surface.
Uniformity measurement with wafer tilt correction
The
“Tilt at midway” autofocus function